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1 (0.1μm) of super-clean room design

HEPA filter section in the ultra-efficient handling of air in the main section of diameter 0.1 ~ l \air preheating, wrapped the cold section,[link widoczny dla zalogowanych], heating, humidification temperature and automatic temperature control section and the above paragraph, in addition to humidification section, the same as with the general cleaning system, steam humidification steam humidifier is not used generally, but with clean steam humidification . clean steam production process through the water / steam heat exchanger with pressure, using steam to heat the water in general, the heating of the clean water into steam to stay,[link widoczny dla zalogowanych], etc. 3 Wu: l level (01 Arsenazo) super clean Design and Analysis of Vision 3, 5,[link widoczny dla zalogowanych], last paragraph of the ultra-high efficiency filter purification system problems in the last paragraph of ordinary high efficiency filter is covered,[link widoczny dla zalogowanych], sealed sump, the use of circulating fans for air circulation, while the super-clean room is littered with FFU. FFU is with a super-efficient fan filter unit for the air in diameter 0.I - 0.5m of the dust particles, the filtration efficiency requirements for 99.9999% (O.1 pin 1) (DOP method) Initial resistance <250Pa. This approach has the advantage of more uniform air flow to ensure clean wind discontinuity in 035I'll / s or more (studio), another advantage is that noise, vibration, and more flexible operation. 4 clean room pressure control to ensure positive pressure during operation is of particular importance. The use of super-clean room interior pressure sensors, frequency control the size of the new fan to maintain indoor air flow pressure. If the clean room pressure is less than required, the increase of air flow fan; if the clean room pressure is greater than the required value, the wind off a small fan. As is the frequency control air flow fan, so small changes in interior pressure, to fine-tune air volume fan frequency to ensure positive pressure clean room within the accuracy required. References: last paragraph of the dry coil through the chilled water temperature is too low, will produce condensate. condensate water contains sodium ions, if the air through the coil, it will pollute the air . This system of chilled water temperature and the new air conditioner temperature of chilled water coolers, as are 6 ℃, so it is difficult to ensure that the last paragraph of the cooling coil is so wet, so we recommend that the last paragraph of the coil of chilled water temperature improved, or added after the last paragraph of the coil chemical filters, or FFU in a number of critical chemical filters on the increase. Another problem is the relative humidity of studio (45 ± 10)%. According to some information on the introduction, indoor relative humidity will affect the outlet concentration of high efficiency filter, so the relative humidity control (45 ± 5)% as well. 6 thread, then super-clean room not only for the cleanliness, temperature, humidity and pressure have high requirements, but its noise, vibration, illumination, anti-static and other technical parameters also have special requirements. Therefore, super-clean room designed not only to pay attention to the above three aspects, but also in installation, commissioning, operation and other aspects of attention. [1] U.S. Federal Standard 209E, clean Wong and clean clean air in the region such as floating particles suspect [s]. [2] Chinese National Standard Gt ~ 73-84. design of clean 【s]. [3] Xu Chung Jin-Ming Shen Stanford. air cleaning technology 【M]. Beijing: China Building Industry Press .1983.108 ~ 235Analysisof0.1ttmSuper-clean-roomDesignWUGao.CONGYi (ZhengzhouTextile [nstitute, Zhengzhou450007, China) Abstract: Byanalysingthedesigningof0.1msuper-dean- room, thethreekeyfactorsfortherc0rndesignteehniqucesarepointedont, i.eprimaryairhandlingsystem, terminalsuper-highefficiencyfilterandtx ~ itive-pressurecontro1.TheproposalsfordesigningareputforwardattheMiletime.Keywords: 0.1fm1super · clean · roonl; primaryairhandling; fanfilterunit; tx ~ itivepr a
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